由于等离子体增强化学的气相沉积（PECVD）法制备的SiOxNy薄膜中含有大量H原子,因而具有优异的表面钝化性能。通过在PERC太阳电池的Al2O3/SiNx背钝化叠层中间插入一层SiOxNy薄膜,形成Al2O3/SiOxNy/SiNx结构,可避免SiNx所带的固定正电荷对Al2O3负电荷场钝化效应的负面影响。试验结果表明,硅片少子寿命从原来的130 μs提高至162 μs,电池转换效率增加0.09%。同时,基于Al2O3/SiOxNy/SiNx背钝化的PERC太阳电池的LID也得到了改善,由对照组的1.83%下降到实验组的1.09%。
Abstract
Due to a large number of H atoms, the SiOxNy film prepared by PECVD has shown excellent surface passivation performance. By inserting a layer of SiOxNy film between the Al2O3/SiNx rear passivation structure of PERC solar cells, Al2O3/SiOxNy/SiNx is formed, which can avoid the negative effect of the fixed positive charge carried by SiNx on the negative charge field passivation effect of Al2O3. As a result, the silicon minority carrier lifetime increased from 130 μs to 162 μs, and the cell conversion efficiency increased by 0.09%. The LID of the PERC cell based on Al2O3/SiOxNy/SiNx rear passivation structure was also improved, decreasing from 1.83% in the control group to 1.09% in the experimental group.
关键词
PERC太阳电池 /
背钝化 /
SiOxNy /
LID /
叠层膜 /
场钝化
Key words
PERC solar cells /
rear passivation /
SiOxNy /
LID /
laminated film /
field passivation
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