电致发光（EL）检测是PERC太阳电池生产中常用的缺陷检测方法,其中位于太阳电池中间位置缺陷的降级占EL检测不良降级的50%以上,成为了各大太阳电池制造企业EL检测良率突破99%的主要障碍。为找到缺陷的成因并改善这种问题,进而提升太阳电池的质量降低制造成本,该文对太阳电池EL检测下中间位置出现缺陷的原因进行分析研究。通过QE测试和元素成分分析排除由硅片质量和杂质污染所引起缺陷的可能性,再结合电化学电容-电压方法（ECV）及扫描电镜（SEM）测试,确定PERC电池中间位置缺陷的产生是由于扩散工艺表面杂质浓度过高所导致的。该文针对缺陷成因提出有效的解决方案有助于提升太阳电池的质量及EL检测良率。
Abstract
Electroluminescence （EL） inspection is a common defect detection method in PERC solar cell production, in which degradation of defect located in the middle of the cell accounts for more than 50% of total undesirable degradation detected by EL and has become a major obstacle for major PV manufacturing companies to break 99% of EL inspection yields. In order to find the causes of defects and improve this problem, improve the quality of solar cells and reduce cell manufacturing costs, this paper analyses and investigates the causes of defects that occur in the middle of the cell under EL inspection. Using quantum efficiency test and elemental analysis to rule out the possibility of defects caused by wafer quality and impurity contamination, combined with electrochemical capacitance-voltage（ECV） and scanning electron microscopy（SEM） tests, it is determined that the defects in the intermediate position of PERC cells are caused by a too high concentration of impurities on the surface of the diffusion process. Effective solutions are proposed to address the causes of defects, which can help to improve the quality of solar cells and increase the yield of cell EL inspection.
关键词
PERC电池 /
缺陷 /
表面掺杂浓度 /
EL /
绒面形貌
Key words
PERC cell /
defect /
surface doping concentration /
EL /
surface morphology of texture
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基金
河南省中国科学院科技成果转移转化项目（2020108）
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