MoNx薄膜制备及其在柔性不锈钢CIGS太阳电池中的应用

韩胜男; 常萱; 陈静伟; 李晓莉; 许颖

doi:10.19912/j.0254-0096.tynxb.2022-0403

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太阳能学报 ›› 2023, Vol. 44 ›› Issue (7) : 122-128. DOI: 10.19912/j.0254-0096.tynxb.2022-0403

MoN_x薄膜制备及其在柔性不锈钢CIGS太阳电池中的应用

韩胜男, 常萱, 陈静伟, 李晓莉, 许颖

作者信息 +

FABRICATION OF MoN_xTHIN FILMS AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS

Han Shengnan, Chang Xuan, Chen Jingwei, Li Xiaoli, Xu Ying

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摘要

采用反应磁控溅射法制备MoN_x薄膜,研究N₂流量对MoN_x薄膜的结构、形貌、元素组分和光电学特性的影响。通过XRD、SEM、紫外-可见分光光度计等测试,结果表明：当增大N₂流量时,薄膜晶相由Mo相向Mo₂N相逐渐发生改变,且薄膜的反射率也发生变化,而后利用MoN_x薄膜作为抑制Fe等杂质向CIGS薄膜扩散的阻挡层;XRD、SEM结果表明,MoN_x薄膜的引入不会影响Mo薄膜、CIGS薄膜晶体结构和形貌;此外,二次离子质谱（SIMS）表明,MoN_x阻挡层显著降低了CIGS薄膜中Fe的浓度,最终,将柔性CIGS太阳电池的光电转换效率由10%提升至12.5%。

Abstract

MoN_x thin films are prepared by reactive magnetron sputtering. The effects of N₂ flow on the structure, morphology, elemental composition and photoelectric properties of MoN_x thin films are investigated. The results show that with the flow rate of N₂ increased, the crystal phase of the films gradually changes from Mo phase to Mo₂N phase. The reflectivity of the films also increases with the increases of N₂ flow. XPS analysis showed that the oxidation states ratio of Mo^δ+ is increases with the increases of N₂ flow. MoN_x is deposited on stainless steel as a diffusion barrier layer for CIGS solar cells. SIMS measurement revealed that Fe diffusion is suppressed with the MoN_x barrier layer. Finally, the efficiency of the flexible CIGS solar cell is increased from 10% to 12.5%.

导出引用

韩胜男, 常萱, 陈静伟, 李晓莉, 许颖. MoN_x薄膜制备及其在柔性不锈钢CIGS太阳电池中的应用[J]. 太阳能学报. 2023, 44(7): 122-128 https://doi.org/10.19912/j.0254-0096.tynxb.2022-0403

Han Shengnan, Chang Xuan, Chen Jingwei, Li Xiaoli, Xu Ying. FABRICATION OF MoN_xTHIN FILMS AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS[J]. Acta Energiae Solaris Sinica. 2023, 44(7): 122-128 https://doi.org/10.19912/j.0254-0096.tynxb.2022-0403

中图分类号： TM615

参考文献

[1] 高兵, 沈辉. CIGS/Si异质结太阳电池的数值模拟[J]. 太阳能学报, 2018, 39(5): 1284-1290.
GAO B, SHEN H.Numerical simulation of CIGS/Si heterojunction solar cells[J]. Acta energiae solaris sinica, 2018, 39(5):1284-1290.
[2] NAKAMURA M, YAMAGUCHI K, KIMOTO Y, et al.Cd-free Cu(In,Ga)Se₂ thin-film solar cell with record efficiency of 23.35%[J]. IEEE journal of photovoltaics, 2019, 9(6): 1863-1867.
[3] TUTTLE J R, SZALAJ A, KEANE J.A 15.2% AMO/1433 W/kg thin-film Cu(In,Ga)Se₂ solar cell for space applications[C]//Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference-2000(Cat. No.00 CH37036), Anchorage, AK, USA, 2000.
[4] ZHANG R, HOLLARS D R, KANICKI J.High efficiency Cu(In,Ga)Se₂ flexible solar cells fabricated by roll-to-roll metallic precursor co-sputtering method[J]. Japanese journal of applied physics, 2013, 52(9): 092302.
[5] CHIRIL A, REINHARD P, PIANEZZI F, et al.Potassium-induced surface modification of Cu(In,Ga)Se₂ thin films for high-efficiency solar cells[J]. Nature materials, 2013, 12(12): 1107-1111.
[6] BALESTRIERI M, ACHARD V, HILDEBRANDT T, et al.Structural characterization of coevaporated Cu(In,Ga)Se₂ absorbers deposited at low temperature[J]. Journal of alloys and compounds, 2019, 794: 654-661.
[7] JACKSON P, GRABITZ P, STROHM A, et al.Contamination of Cu(In,Ga)Se₂ solar cells by metallic substrate elements[C]//19th European Photovoltaic Solar Energy Conference, Paris, France, 2004: 1936-1938.
[8] LI B Y, ZHANG Y, WANG B, et al.The role of growth temperature and Se flux on Cu(In,Ga)Se₂ thin film deposited on a stainless steel substrate and solar cell[J]. Semiconductor science and technology, 2012, 27(6): 065007.
[9] HERZ K, EICKE A, KESSLER F, et al.Diffusion barriers for CIGS solar cells on metallic substrates[J]. Thin solid films, 2003, 431(5): 392-397.
[10] WUERZ R, EICKE A, FRANKENFELD M, et al.CIGS thin-film solar cells on steel substrates[J]. Thin solid films, 2009, 517(7): 2415-2418.
[11] 商慧荣, 沈鸿烈, 孙孪鸿, 等. 不同扩散阻挡层对柔性钛衬底CZTSSe薄膜与电池性能的影响[J]. 太阳能学报, 2020, 41(6): 242-246.
SHANG H R, SHEN H L, SUN L H, et al.Effects of different diffusion barriers on the performance of CZTSSe thin films and cells on flexible titanium substrates[J]. Acta energiae solaris sinica, 2020, 41(6): 242-246.
[12] KIM K B, KIM M, BAEK J, et al.Influence of Cr thin films on the properties of flexible CIGS solar cells on steel substrates[J]. Electronic materials letters, 2014, 10(1): 247-251.
[13] PARK H, KIM S C, BAE H C, et al.ALD-Grown Al₂O₃ as a diffusion barrier for stainless steel substrates for flexible Cu(InGa)Se₂ solar cells[J]. Molecular crystals and liquid crystals, 2011, 551(1): 147-153.
[14] TSENG C W, LI T T, LIN W T, et al.Effects of SiO_x barrier layers deposited by spray technique for CIGS solar cells on metallic substrates[J]. ECS transactions, 2014, 60(1): 1287-1294.
[15] KHELIFI S, BELGHACHI A, LAUWAERT J, et al.Characterization of flexible thin film CIGSe solar cells grown on different metallic foil substrates[J]. Energy procedia, 2010, 2(1): 109-117.
[16] SHI C Y, SUN Y, HE Q, et al.Cu(In, Ga)Se₂ solar cells on stainless-steel substrates covered with ZnO diffusion barriers[J]. Solar energy materials and solar cells, 2009, 93(5): 654-656.
[17] ZHAO B, SUN K, SONG Z, et al.Ultrathin Mo/MoN bilayer nanostructure for diffusion barrier application of advanced Cu metallization[J]. Applied surface science, 2010, 256(20): 6003-6006.
[18] JANG Y J, KIM J B, HONG T E, et al.Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu[J]. Journal of alloys and compounds, 2016, 663: 651-658.
[19] WANG T, ZHANG G J, REN S, et al.Effect of nitrogen flow rate on structure and properties of MoN_x coatings deposited by facing target sputtering[J]. Journal of alloys and compounds, 2017, 701: 1-8.
[20] XIE Y B, FANG T.Capacitive performance of molybdenum nitride/titanium nitride nanotube array for supercapacitor[J]. Materials science and engineering B, 2017, 215: 64-70.
[21] 刘沅东, 卓胜, 汤清琼, 等. 使用CIGS四元靶材制备高效率电池研究[J]. 太阳能学报, 2018, 39(2): 567-571.
LIU Y D, ZHUO S, TANG Q Q, et al.Preparation of high efficiency cells using CIGS quaternary targets[J]. Acta energiae solaris sinica, 2018, 39(2): 567-571
[22] KIM G T, PARK T K, CHUNG H, et al.Growth and characterization of chloronitroaniline crystals for optical parametric oscillators i. xps study of mo-based compounds[J]. Applied surface science, 1999, 152(1-2): 35-43.
[23] LI Y J, LI Y X, ZHANG G H, et al.Stable molybdenum nitride contact for efficient silicon solar cells[J]. Physica status solidi (RRL)-rapid research letters, 2021, 15(12): 2100159.
[24] SUBBURAJ T, CHIU G L, SOM S, et al.Influence of doping iron ions into Cu(In,Ga)Se₂ films in the morphology and photovoltaic properties of thin-film solar cells[J]. Journal of ceramic processing research, 2017, 18(10): 754-759.
[25] HARTMANN M, SCHMIDT M, JASENEK A, et al.Flexible and light weight substrates for Cu(In, Ga)Se₂ solar cells and modules[C]//Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference-2000(Cat. No.00CH37036), Anchorage, AK, USA, 2000.
[26] AWK B, AIL R, AJ S, et al.Impact of substrate roughness on CuIn_xGa₁-_xSe₂ device properties[J]. Solar energy materials & solar cells, 2004, 83(1): 67-80.
[27] LI B Y, ZHANG Y, WANG H, et al.Preferred orientation of Cu(In,Ga)Se₂ thin film deposited on stainless steel substrate[J]. Progress in photovoltaics: research and applications, 2013, 21(5): 838-848.
[28] BLÖSCH P, PIANEZZI F, CHIRILĂ A, et al. Diffusion barrier properties of molybdenum back contacts for Cu(In,Ga)Se₂ solar cells on stainless steel foils[J]. Journal of applied physics, 2013, 113(5): 054506.