针对石英坩埚在连续拉晶过程中需要长时间在温场和压力的环境下起到承载硅熔体作用的问题,提出内部的气泡变化可能会引起拉晶过程中晶棒的“断线”问题。针对石英坩埚内气泡在直拉单晶硅前后的变化规律和温度变化情况分别进行实验和模拟研究。结果表明,使用过的试样中气泡含量高于未使用过的试样,石英坩埚在使用前后的试样中观察到φ=10~100 μm的气泡较多,其中外壁φ=100~200 μm的气泡明显增多,内壁的气泡在石英坩埚使用前后明显长大,侧壁、拐角和底部的气泡变化较为平均,拐角处在较高温度下约φ=200 μm的气泡较多,随着拉晶过程的进行晶棒出现“断线”现象的可能增大。
Abstract
Aiming at the problem that the quartz crucible needs to play the role of carrying silicon melt for a long time under the environment of temperature field and pressure in the continuous crystal pulling process, it is proposed that the change of gas bubbles inside the crucible may cause the “breakage” of crystal rods in the crystal pulling process. For the quartz crucible bubble change rule before and after straight pulling single crystal silicon and temperature variation, the experiments and simulation studies were carried out. The results show that the bubble content in the used specimen is higher than that in the unused specimen, and more bubbles with φ=10-100 μm are observed in the specimen before and after the use of the quartz crucible, among which the bubbles with φ=100-200 μm on the outer wall are obviously increased, and the bubbles on the inner wall grow significantly before and after the use of the quartz crucible, and the bubbles on the side wall, corner and bottom change in a relatively average way, and the bubbles at the corner at the higher temperature are not as big as those on the inner wall, and the bubbles at the bottom of the crucible at the lower temperature are not as big as those in the outer wall. The bubbles around φ=200 μm are more in the corners, and the possibility of “broken line” phenomenon of the crystal rods increases with the process of crystal pulling.
关键词
石英 /
单晶硅 /
气泡形成 /
温度 /
固液界面
Key words
quartz /
monocrystalline silicon /
bubble formation /
temperature /
crystal-melt interface
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基金
国家自然科学基金（51962030）; 银川市科技创新项目（2022XQZD006）; 中央引导地方科技发展专项（2021FRD05006）; 宁夏自治区重大项目（2024ZDYF1254）
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