磁控溅射法制备Al2O3薄膜及其在柔性不锈钢CIGS太阳电池中的应用

葛圣铸; 王浩; 马双义; 常萱; 许颖; 陈静伟

doi:10.19912/j.0254-0096.tynxb.2024-0297

PDF(2964 KB)

太阳能学报 ›› 2026, Vol. 47 ›› Issue (4) : 599-605. DOI: 10.19912/j.0254-0096.tynxb.2024-0297

磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用

葛圣铸, 王浩, 马双义, 常萱, 许颖, 陈静伟

作者信息 +

FABRICATION OF Al₂O₃ THIN FILM BY MAGNETRON SPUTTERING AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS

Ge Shengzhu, Wang Hao, Ma Shuangyi, Chang Xuan, Xu Ying, Chen Jingwei

Author information +

文章历史 +

摘要

本研究采用射频磁控溅射技术在柔性不锈钢基底上沉积Al₂O₃薄膜,作为铜铟镓硒(CIGS)薄膜太阳能电池中抑制元素扩散的阻挡层,研究不同厚度的Al₂O₃薄膜对不锈钢表面粗糙度和CIGS吸收层的结晶质量、晶体结构和光电特性的影响。原子力显微镜（AFM）、扫描电子显微镜（SEM）、X射线衍射仪（XRD）测试结果表明：在不锈钢表面沉积Al₂O₃薄膜,显著可降低不锈钢表面的粗糙度,为后续薄膜的沉积提供平整的表面,且可减少不锈钢衬底中Fe向吸收层CIGS的扩散,CIGS吸收层结晶质量得到明显改善;此外,通过二次离子质谱仪（SIMS）分析,Al₂O₃薄膜将CIGS吸收层内Fe的浓度限制在约6×10¹⁷atom/cm³。最终,沉积350 nm厚Al₂O₃阻挡层的CIGS太阳电池光电转换效率从10.89%提升到15.80%。

Abstract

Al₂O₃ thin films with different thicknesses were deposited by radio frequency sputtering and used as the barrier layer for flexible CIGS solar cells on stainless-steel foil. The effects of these Al₂O₃ thin films on the surface roughness of stainless steel, as well as the crystalline quality, crystal structure, and photoelectric properties of the CIGS absorption layer, were investigated. Results from AFM, SEM, and XRD characterizations show that depositing Al₂O₃ thin films on the stainless-steel surface significantly reduces its surface roughness, providing a smooth surface for subsequent film deposition. Moreover, it reduces the diffusion of Fe from the stainless-steel substrate into the CIGS absorption layer, leading to a noticeable improvement in the crystalline quality of the CIGS layer. Additionally, secondary ion mass spectrometry （SIMS） analysis indicates that the Al₂O₃ thin films limit the Fe concentration in the CIGS absorption layer to approximately 6×10¹⁷ atoms/cm³. Finally, the conversion efficiency of the CIGS solar cell with a 350 nm-thick Al₂O₃ barrier layer increases from 10.89% to 15.80%.

导出引用

葛圣铸, 王浩, 马双义, 常萱, 许颖, 陈静伟. 磁控溅射法制备Al₂O₃薄膜及其在柔性不锈钢CIGS太阳电池中的应用[J]. 太阳能学报. 2026, 47(4): 599-605 https://doi.org/10.19912/j.0254-0096.tynxb.2024-0297

Ge Shengzhu, Wang Hao, Ma Shuangyi, Chang Xuan, Xu Ying, Chen Jingwei. FABRICATION OF Al₂O₃ THIN FILM BY MAGNETRON SPUTTERING AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS[J]. Acta Energiae Solaris Sinica. 2026, 47(4): 599-605 https://doi.org/10.19912/j.0254-0096.tynxb.2024-0297

中图分类号： TM615

参考文献

[1] HAN Q F, HSIEH Y T, MENG L, et al.High-performance perovskite/Cu(In, Ga)Se₂ monolithic tandem solar cells[J]. Science, 2018, 361(6405): 904-908.
[2] 陈敬欣, 丁阳, 张翼飞, 等. 基于柔性晶体硅电池的光伏瓦研究[J]. 太阳能学报, 2022, 43(8): 104-107.
CHEN J X, DING Y, ZHANG Y F, et al.Research on photovoltaic tiles based on flexible crystalline silicon cells[J]. Acta energiae solaris sinica, 2022, 43(8): 104-107.
[3] 王君, 余本东, 王矗垚, 等. 太阳能光伏光热建筑一体化(BIPV/T)研究新进展[J]. 太阳能学报, 2022, 43(6): 72-78.
WANG J, YU B D, WANG C Y, et al.New advancements of building integrated photovoltaic/thermal system(BIPV/T)[J]. Acta energiae solaris sinica, 2022, 43(6): 72-78.
[4] MUFTI N, AMRILLAH T, TAUFIQ A, et al.Review of CIGS-based solar cells manufacturing by structural engineering[J]. Solar energy, 2020, 207: 1146-1157.
[5] RAMANUJAM J, BISHOP D M, TODOROV T K, et al.Flexible CIGS, CdTe and a-Si: H based thin film solar cells: a review[J]. Progress in materials science, 2020, 110: 100619.
[6] 韩胜男, 常萱, 陈静伟, 等. MoN_x薄膜制备及其在柔性不锈钢CIGS太阳电池中的应用[J]. 太阳能学报, 2023, 44(7): 122-128.
HAN S N, CHANG X, CHEN J W, et al.Fabrication of MoN_x thin films and its applications in flexible stainless steel cigs solar cells[J]. Acta energiae solaris sinica, 2023, 44(7): 122-128.
[7] KELLER J, KISELMAN K, DONZEL-GARGAND O, et al.High-concentration silver alloying and steep back-contact gallium grading enabling copper indium gallium selenide solar cell with 23.6% efficiency[J]. Nature energy, 2024, 9: 467-478.
[8] CARRON R, NISHIWAKI S, FEURER T, et al.Advanced alkali treatments for high-efficiency Cu(In, Ga)Se₂ solar cells on flexible substrates[J]. Advanced energy materials, 2019, 9(24): 1900408.
[9] SHUKLA A K, SUDHAKAR K, BAREDAR P.Recent advancement in BIPV product technologies: a review[J]. Energy and buildings, 2017, 140: 188-195.
[10] LI B Y, ZHANG Y, WANG B, et al.The role of growth temperature and Se flux on Cu(In, Ga)Se₂ thin film deposited on a stainless steel substrate and solar cell[J]. Semiconductor science and technology, 2012, 27(6): 065007.
[11] LUO J, TANG L T, WANG S J, et al.Manipulating Ga growth profile enables all-flexible high-performance single-junction CIGS and 4 T perovskite/CIGS tandem solar cells[J]. Chemical engineering journal, 2023, 455: 140960.
[12] LI B Y, ZHANG Y, WANG H, et al.Preferred orientation of Cu(In, Ga)Se₂ thin film deposited on stainless steel substrate[J]. Progress in photovoltaics: research and applications, 2013, 21(5): 838-848.
[13] CHANTANA J, TERAJI S, WATANABE T, et al.Influences of Fe and absorber thickness on photovoltaic performances of flexible Cu(In, Ga)Se₂ solar cell on stainless steel substrate[J]. Solar energy, 2018, 173: 126-131.
[14] MISRA P, ATCHUTA S R, MANDATI S, et al.A non-vacuum dip coated SiO₂ interface layer for fabricating CIGS solar cells on stainless steel foil substrates[J]. Solar energy, 2021, 214: 471-477.
[15] LIU W S, HU H C, PU N W, et al.Developing flexible CIGS solar cells on stainless steel substrates by using Ti/TiN composite structures as the diffusion barrier layer[J]. Journal of alloys and compounds, 2015, 631: 146-152.
[16] SHI S, YAO L, MA P, et al.Recent progress in the high-temperature-resistant PI substrate with low CTE for CIGS thin-film solar cells[J]. Materials today energy, 2021, 20: 100640.
[17] BAE D, KWON S, OH J, et al.Investigation of Al₂O₃ diffusion barrier layer fabricated by atomic layer deposition for flexible Cu(In, Ga)Se₂ solar cells[J]. Renewable energy, 2013, 55: 62-68.
[18] KELLER J, GUSTAVSSON F, STOLT L, et al.On the beneficial effect of Al₂O₃ front contact passivation in Cu(In, Ga)Se₂ solar cells[J]. Solar energy materials and solar cells, 2017, 159: 189-196.
[19] PARK H, KIM S C, BAE H C, et al.ALD-grown Al₂O₃ as a diffusion barrier for stainless steel substrates for flexible Cu(InGa)Se₂ solar cells[J]. Molecular crystals and liquid crystals, 2011, 551(1): 147-153.
[20] JACKSON P, WUERZ R, HARISKOS D, et al.Effects of heavy alkali elements in Cu(In,Ga)Se₂ solar cells with efficiencies up to 22.6%[J]. Physica status solidi (RRL)-rapid research letters, 2016, 10(8): 583-586.
[21] CHO D H, CHUNG Y D, LEE K S, et al.Photovoltaic performance of flexible Cu(In,Ga)Se₂ thin-film solar cells with varying Cr impurity barrier thickness[J]. Current applied physics, 2013, 13(9): 2033-2037.
[22] LIANG X, ZHU H, CHEN J, et al.Substrate temperature optimization for Cu(In,Ga)Se₂ solar cells on flexible stainless steels[J]. Applied surface science, 2016, 368: 464-469.
[23] BAE D, KWON S, OH J, et al.Fabrication of high efficiency flexible CIGS solar cell with ZnO diffusion barrier on stainless steel substrate[J]. MRS online proceedings library, 2011, 1324(1): 1805.
[24] PIANEZZI F, NISHIWAKI S, KRANZ L, et al.Influence of Ni and Cr impurities on the electronic properties of Cu(In, Ga)Se₂ thin film solar cells[J]. Progress in photovoltaics: research and applications, 2015, 23(7): 892-900.
[25] JACKSON P, GRABITZ P, STROHM A, et al.Contamination of Cu(In,Ga)Se₂ solar cells by metallic substrate elements[C]//Proceedings of the 19th European Photovoltaic Solar Energy Conference. Paris, france, 2004, 7-11.
[26] SHI C Y, SUN Y, HE Q, et al.Cu(In, Ga)Se₂ solar cells on stainless-steel substrates covered with ZnO diffusion barriers[J]. Solar energy materials and solar cells, 2009, 93(5): 654-656.
[27] CHANG X, CHEN J W, MA S Y, et al.Implementation of tunneling junction passivated contact concept in flexible CIGS solar cells[J]. Advanced materials interfaces, 2023, 10(4): 2202171.
[28] HEGEDUS S S, SHAFARMAN W N.Thin-film solar cells: device measurements and analysis[J]. Progress in photovoltaics: research and applications, 2004, 12(2/3): 155-176.
[29] LEE S J, CHEN Y H, HU S C, et al.Improved performance of amorphous Si thin-film solar cells on 430 stainless steel substrate by an electrochemical mechanical polishing process[J]. Journal of alloys and compounds, 2013, 558: 95-98.
[30] LI J J, KIM S, NAM D, et al.Tailoring the defects and carrier density for beyond 10% efficient CZTSe thin film solar cells[J]. Solar energy materials and solar cells, 2017, 159: 447-455.