带有反时限保护的PECVD镀膜设备的研究

黄禹杰; 于文英; 刘永生; 卢武; 周桃

doi:10.19912/j.0254-0096.tynxb.2024-2194

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太阳能学报 ›› 2026, Vol. 47 ›› Issue (4) : 672-678. DOI: 10.19912/j.0254-0096.tynxb.2024-2194

带有反时限保护的PECVD镀膜设备的研究

黄禹杰¹, 于文英², 刘永生², 卢武³, 周桃¹

作者信息 +

RESEARCH ON PECVD COATING EQUIPMENT WITH INVERSE-TIME LIMIT PROTECTION

Huang Yujie¹, Yu Wenying², Liu Yongsheng², Lu Wu³, Zhou Tao¹

Author information +

文章历史 +

摘要

管式等离子体增强化学气相沉积（PECVD）设备是一种用于太阳电池表面镀膜的设备,在运行过程中可能会出现短路故障或电路过载的情况,针对这一问题,提出一种带有反时限保护功能的控制电路模型。首先,建立双向可控硅控制电路模型,通过双向可控硅控制电路的开通和关断时间,改变导通角的大小,从而调节输出功率;其次,根据可能出现的过流倍数,设计反时限过流保护电路;最后,在Matlab/simulink 平台中搭建仿真模型,对电路设计的可行性进行验证,仿真结果显示,该模型可实现反时限过流保护,能解决管式PECVD设备的安全问题。

Abstract

Tubular PECVD （Plasma-Enhanced Chemical Vapour Deposition） is a kind of equipment used for surface coating of solar cells,which may have short circuit faults or circuit overload during operation. Firstly,the bidirectional thyristor control circuit model was established,and the magnitude of the conduction angle was changed through the opening and shutdown time of the bidirectional thyristor control circuit,so as to adjust the output power. Secondly,according to the possible overcurrent multiple,the inverse-time overcurrent protection circuit is designed. Finally,a simulation model was built in the Matlab/Simulink platform to verify the feasibility of the circuit design.The simulation results show that this model can realize inverse-time overcurrent protection and solve the safety problems of tubular PECVD equipment.

导出引用

黄禹杰, 于文英, 刘永生, 卢武, 周桃. 带有反时限保护的PECVD镀膜设备的研究[J]. 太阳能学报. 2026, 47(4): 672-678 https://doi.org/10.19912/j.0254-0096.tynxb.2024-2194

Huang Yujie, Yu Wenying, Liu Yongsheng, Lu Wu, Zhou Tao. RESEARCH ON PECVD COATING EQUIPMENT WITH INVERSE-TIME LIMIT PROTECTION[J]. Acta Energiae Solaris Sinica. 2026, 47(4): 672-678 https://doi.org/10.19912/j.0254-0096.tynxb.2024-2194

中图分类号： TM615.2

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