EFFECT OF POST-DEPOSITION HYDROGEN PLASMA TREATMENT TO PASSIVATION LAYER ON PERFORMANCE OF SILICON HETEROJUNCTION SOLAR CELL

Liu Huan; You Jiachuan; Zhao Lei; Wang Wenjing; Qu Minghao; Xu Xixiang

doi:10.19912/j.0254-0096.tynxb.2020-1113

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Acta Energiae Solaris Sinica ›› 2022, Vol. 43 ›› Issue (7) : 140-144. DOI: 10.19912/j.0254-0096.tynxb.2020-1113

EFFECT OF POST-DEPOSITION HYDROGEN PLASMA TREATMENT TO PASSIVATION LAYER ON PERFORMANCE OF SILICON HETEROJUNCTION SOLAR CELL

Liu Huan^1,2, You Jiachuan^1,2, Zhao Lei^1~3, Wang Wenjing^1~3, Qu Minghao⁴, Xu Xixiang⁴

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Abstract

The effect of post-deposition hydrogen plasma treatment （HPT） to the intrinsic hydrogenated amorphous silicon （a-Si:H（i）） passivation layer on the performance of the silicon heterojunction （SHJ） solar cell with high efficiency （>23%） was investigated. It was found that HPT with an appropriate time could improve the passivation effect slightly and thus increase the solar cell efficiency. However, HPT with an over-long time obviously made the passivation effect deteriorate and the effective minority carrier lifetime （τeff） decrease. The analysis demonstrated that with the increase of HPT time, more and more hydrogen atoms entered the a-Si:H（i） layer, resulting in the SiH₂ amount increase in the layer. The microstructure factor （R） of the layer increased and the layer quality became poor. The results indicated that the HPT process should be controlled carefully when the original solar cell efficiency was high since the solar cell performance improvement from HPT was limited in such a case.

Key words

silicon heterojunction / solar cells / PECVD / hydrogen plasma treatment / passivation

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Liu Huan, You Jiachuan, Zhao Lei, Wang Wenjing, Qu Minghao, Xu Xixiang. EFFECT OF POST-DEPOSITION HYDROGEN PLASMA TREATMENT TO PASSIVATION LAYER ON PERFORMANCE OF SILICON HETEROJUNCTION SOLAR CELL[J]. Acta Energiae Solaris Sinica. 2022, 43(7): 140-144 https://doi.org/10.19912/j.0254-0096.tynxb.2020-1113

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