STUDY ON VARIATION PATTERN OF BUBBLES IN QUARTZ CRUCIBLE DURING CONTINUOUS CRYSTAL PULLING PROCESS

Shi Xingyu; Li Jin; He Xian; Ma Run; Wang Zhongliang

doi:10.19912/j.0254-0096.tynxb.2023-1164

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Acta Energiae Solaris Sinica ›› 2024, Vol. 45 ›› Issue (12) : 101-106. DOI: 10.19912/j.0254-0096.tynxb.2023-1164

STUDY ON VARIATION PATTERN OF BUBBLES IN QUARTZ CRUCIBLE DURING CONTINUOUS CRYSTAL PULLING PROCESS

Shi Xingyu, Li Jin, He Xian, Ma Run, Wang Zhongliang

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Abstract

Aiming at the problem that the quartz crucible needs to play the role of carrying silicon melt for a long time under the environment of temperature field and pressure in the continuous crystal pulling process, it is proposed that the change of gas bubbles inside the crucible may cause the “breakage” of crystal rods in the crystal pulling process. For the quartz crucible bubble change rule before and after straight pulling single crystal silicon and temperature variation, the experiments and simulation studies were carried out. The results show that the bubble content in the used specimen is higher than that in the unused specimen, and more bubbles with φ=10-100 μm are observed in the specimen before and after the use of the quartz crucible, among which the bubbles with φ=100-200 μm on the outer wall are obviously increased, and the bubbles on the inner wall grow significantly before and after the use of the quartz crucible, and the bubbles on the side wall, corner and bottom change in a relatively average way, and the bubbles at the corner at the higher temperature are not as big as those on the inner wall, and the bubbles at the bottom of the crucible at the lower temperature are not as big as those in the outer wall. The bubbles around φ=200 μm are more in the corners, and the possibility of “broken line” phenomenon of the crystal rods increases with the process of crystal pulling.

Key words

quartz / monocrystalline silicon / bubble formation / temperature / crystal-melt interface

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Shi Xingyu, Li Jin, He Xian, Ma Run, Wang Zhongliang. STUDY ON VARIATION PATTERN OF BUBBLES IN QUARTZ CRUCIBLE DURING CONTINUOUS CRYSTAL PULLING PROCESS[J]. Acta Energiae Solaris Sinica. 2024, 45(12): 101-106 https://doi.org/10.19912/j.0254-0096.tynxb.2023-1164

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