The article simulates the reaction distillation process for producing high-purity monosilane from trichlorosilane-containing impurities through a disproportionation reaction. Using reaction distillation method can solve the problems of low conversion rate and high impurity content in the disproportionation reaction of trichlorosilane. The optimal operating conditions are determined by adjusting the feed position, distillation ratio, reflux ratio, and residence time. The simulation results show that under the conditions of a feed position of the 21st plate, a distillation ratio of 0.2, a reflux ratio of 49.43, and a residence time of 20 s, the purity of silane can reach 5N, and the impurity content is reduced to 10-18, which can be directly used for the production of solar-grade polysilicon; or the purity of silane can reach 9N after purification, and then undergo thermal decomposition to produce electronic-grade polysilicon.
Key words
distillation columns /
silane /
reaction kinetics /
equilibrium stage model /
solar-grade polysilicon
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References
[1] 聂陟枫, 戴恩睿, 谢刚, 等. 多晶硅还原炉高频交流电加热机制研究[J]. 太阳能学报, 2021, 42(2): 451-458.
NIE Z F, DAI E R, XIE G, et al.Investigation on heating mechanism of high frequency alternating current in polysilicon reduction furnace[J]. Acta energiae solaris sinica, 2021, 42(2): 451-458.
[2] Union Carbide Corporation. Process of making silane: CA19750218542[P].1979-02-06.
[3] 杜欢, 吴兢, 孙建华, 等. 新型纳米蜂窝超结构纹理多晶硅的制备、表征及性能研究[J]. 太阳能学报, 2021, 42(7): 161-166.
DU H, WU J, SUN J H, et al.Preparation, characterization and property study of novel nanoscale honeycomb superstructure texture multi-crystalline silicon[J]. Acta energiae solaris sinica, 2021, 42(7): 161-166.
[4] LEPAGE J L, SOULA G. Preparation of silane from methyldichlorosilane and chlorosilanes: US4605543[P].1986-08-12.
[5] 姜文正, 毛文军, 曹忠, 等. 一种去除三氯氢硅中磷硼杂质的工艺: CN101920961A[P].2010-12-22.
JIANG W Z, MAO W J, CAO Z, et al. A method for removing phosphorus and boron from trichlorosilane process of impurities: CN101920961A [P].2010-12-22.
[6] PLAHUTNIK F, ARVIDSON A, SAWYER D, et al.Development of a polysilicon process based on chemical vapor deposition, phase 1 and phase 2[J]. Technical eport, 1982.
[7] BRENEMAN W C, MUI J Y P, Low cost silicon solar array project. Task 1: establishment of the feasibility of a process capable of low cost, high volume production of silane, SiH4[J]. Annual report union carbide corpsistersville, WV, 1976.
[8] BRENEMAN W C, MORIHARA H, FARRIER E G,Low cost silicon solar array project: Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon[R]. DOE/JPL/954334-9, 1978,0(0).
[9] LI K Y, HUANG C D.Redistribution reaction of trichlorosilane in a fixed-bed reactor[J]. Industrial & engineering chemistry research, 1988, 27(9): 1600-1606.
[10] SUN S S, HUANG G Q.Simulation of reactive distillation process for monosilane production via redistribution of trichlorosilane[J]. Chinese journal of chemical engineering, 2014, 22(3): 287-293.
[11] 黄国强, 石秋玲, 王红星, 等. 一种适用于催化反应精馏的新型填料[J]. 化学工程, 2012, 40(5): 15-18.
HUANG G Q, SHI Q L, WANG H X, et al.New type structured packing used in catalytic reaction distillation[J]. Chemical engineering (China), 2012, 40(5): 15-18.
[12] 张远弟. 改良西门子法精馏过程的模拟和优化及其节能工艺研究[D]. 昆明: 昆明理工大学, 2015.
ZHANG Y D.Simulation and optimization of improved Siemens distillation process and research on its energy-saving process[D]. Kunming: Kunming University of Science and Technology, 2015.
[13] 谢旭. 反应精馏用于硅烷法生产多晶硅过程的模拟研究[D]. 东营: 中国石油大学(华东), 2016.
XIE X.Simulation study on reactive distillation used in the production of polysilicon by silane method[D]. Dongying: China University of Petroleum (Huadong), 2016.
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