FABRICATION OF Al2O3 THIN FILM BY MAGNETRON SPUTTERING AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS

Ge Shengzhu; Wang Hao; Ma Shuangyi; Chang Xuan; Xu Ying; Chen Jingwei

doi:10.19912/j.0254-0096.tynxb.2024-0297

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Acta Energiae Solaris Sinica ›› 2026, Vol. 47 ›› Issue (4) : 599-605. DOI: 10.19912/j.0254-0096.tynxb.2024-0297

FABRICATION OF Al₂O₃ THIN FILM BY MAGNETRON SPUTTERING AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS

Ge Shengzhu, Wang Hao, Ma Shuangyi, Chang Xuan, Xu Ying, Chen Jingwei

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Abstract

Al₂O₃ thin films with different thicknesses were deposited by radio frequency sputtering and used as the barrier layer for flexible CIGS solar cells on stainless-steel foil. The effects of these Al₂O₃ thin films on the surface roughness of stainless steel, as well as the crystalline quality, crystal structure, and photoelectric properties of the CIGS absorption layer, were investigated. Results from AFM, SEM, and XRD characterizations show that depositing Al₂O₃ thin films on the stainless-steel surface significantly reduces its surface roughness, providing a smooth surface for subsequent film deposition. Moreover, it reduces the diffusion of Fe from the stainless-steel substrate into the CIGS absorption layer, leading to a noticeable improvement in the crystalline quality of the CIGS layer. Additionally, secondary ion mass spectrometry （SIMS） analysis indicates that the Al₂O₃ thin films limit the Fe concentration in the CIGS absorption layer to approximately 6×10¹⁷ atoms/cm³. Finally, the conversion efficiency of the CIGS solar cell with a 350 nm-thick Al₂O₃ barrier layer increases from 10.89% to 15.80%.

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solar cells / CIGS / barrier layer / Al₂O₃ thin films / stainless steel substrate / Fe diffusion

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Ge Shengzhu, Wang Hao, Ma Shuangyi, Chang Xuan, Xu Ying, Chen Jingwei. FABRICATION OF Al₂O₃ THIN FILM BY MAGNETRON SPUTTERING AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS[J]. Acta Energiae Solaris Sinica. 2026, 47(4): 599-605 https://doi.org/10.19912/j.0254-0096.tynxb.2024-0297

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