RESEARCH ON PECVD COATING EQUIPMENT WITH INVERSE-TIME LIMIT PROTECTION

Huang Yujie; Yu Wenying; Liu Yongsheng; Lu Wu; Zhou Tao

doi:10.19912/j.0254-0096.tynxb.2024-2194

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Acta Energiae Solaris Sinica ›› 2026, Vol. 47 ›› Issue (4) : 672-678. DOI: 10.19912/j.0254-0096.tynxb.2024-2194

RESEARCH ON PECVD COATING EQUIPMENT WITH INVERSE-TIME LIMIT PROTECTION

Huang Yujie¹, Yu Wenying², Liu Yongsheng², Lu Wu³, Zhou Tao¹

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Abstract

Tubular PECVD （Plasma-Enhanced Chemical Vapour Deposition） is a kind of equipment used for surface coating of solar cells,which may have short circuit faults or circuit overload during operation. Firstly,the bidirectional thyristor control circuit model was established,and the magnitude of the conduction angle was changed through the opening and shutdown time of the bidirectional thyristor control circuit,so as to adjust the output power. Secondly,according to the possible overcurrent multiple,the inverse-time overcurrent protection circuit is designed. Finally,a simulation model was built in the Matlab/Simulink platform to verify the feasibility of the circuit design.The simulation results show that this model can realize inverse-time overcurrent protection and solve the safety problems of tubular PECVD equipment.

Key words

photovoltaics / solar cells / plasma enhanced chemical vapor deposition / thyristors / inverse-time overcurrent protection / short-circuit protection

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Huang Yujie, Yu Wenying, Liu Yongsheng, Lu Wu, Zhou Tao. RESEARCH ON PECVD COATING EQUIPMENT WITH INVERSE-TIME LIMIT PROTECTION[J]. Acta Energiae Solaris Sinica. 2026, 47(4): 672-678 https://doi.org/10.19912/j.0254-0096.tynxb.2024-2194

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