PECVD沉积氮化硅膜的工艺研究 

Acta Energiae Solaris Sinica ›› 2011, Vol. 32 ›› Issue (1) : 54-59.

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Acta Energiae Solaris Sinica ›› 2011, Vol. 32 ›› Issue (1) : 54-59.

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