基底及HMVF层厚度变化对NbSiN/NbSiNO/Si₃N₄ 涂层光学性能的影响

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ISSN 0254-0096　CN 11-2082/K

Acta Energiae Solaris Sinica ›› 2014, Vol. 35 ›› Issue (1) : 145-148.

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