CO₂/SiH₄气体流量比对氢化硅氧（SiO_x：H）薄膜微结构和光学特性的影响

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ISSN 0254-0096　CN 11-2082/K

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Acta Energiae Solaris Sinica ›› 2018, Vol. 39 ›› Issue (1) : 149-153.

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