RF-PECVD制备硼掺杂氢化非晶硅氧（a-SiO_x:H）薄膜及其光电特性研究

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ISSN 0254-0096　CN 11-2082/K

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Acta Energiae Solaris Sinica ›› 2018, Vol. 39 ›› Issue (6) : 1646-1650.

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