管式PECVD制备原位掺杂多晶硅的性能研究
黄嘉斌, 赵增超, 李明, 陈俊, 邓新新, 周小荣
STUDY ON PERFORMANCE OF IN-SITU DOPED POLYSILICON PREPARED BY TUBE PECVD
Huang Jiabin, Zhao Zengchao, Li Ming, Chen Jun, Deng Xinxin, Zhou Xiaorong
太阳能学报
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2024, (6): 334
-340
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DOI: 10.19912/j.0254-0096.tynxb.2023-0251
