CH4Cl2Si-SiHCl3-H2体系下硅碳竞争沉积的热力学研究
郭李杰, 袁兴平, 赵丹, 吕庆辉, 谢刚, 侯彦青
THERMODYNAMIC STUDY OF SILICA-CARBON COMPETITIVE DEPOSITION IN CH4Cl2Si-SiHCl3-H2 SYSTEM
Guo Lijie, Yuan Xingping, Zhao Dan, Lyu Qinghui, Xie Gang, Hou Yanqing
太阳能学报
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2025, (8): 327
-332
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DOI: 10.19912/j.0254-0096.tynxb.2024-0524
