磁控溅射法制备Al2O3薄膜及其在柔性不锈钢CIGS太阳电池中的应用
葛圣铸, 王浩, 马双义, 常萱, 许颖, 陈静伟
FABRICATION OF Al2O3 THIN FILM BY MAGNETRON SPUTTERING AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS
Ge Shengzhu, Wang Hao, Ma Shuangyi, Chang Xuan, Xu Ying, Chen Jingwei
太阳能学报
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2026, (4): 599
-605
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DOI: 10.19912/j.0254-0096.tynxb.2024-0297
