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晶体硅太阳电池富硼层与富磷层共刻蚀工艺研究
李文昊, 王会鹏, 何仁, 黄志平, 韦德远, 许颖
INVESTIGATION OF CO-ETCHING PROCESS OF BORON-RICH AND PHOSPHORUS-RICH LAYERS FOR CRYSTALLINE SILICON SOLAR CELLS
Li Wenhao, Wang Huipeng, He Ren, Huang Zhiping, Wei Deyuan, Xu Ying
太阳能学报 . 2026, (8): 217 -224 .  DOI: 10.19912/j.0254-0096.tynxb.2025-0626