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THERMODYNAMIC STUDY OF SILICA-CARBON COMPETITIVE DEPOSITION IN CH4Cl2Si-SiHCl3-H2 SYSTEM
Guo Lijie, Yuan Xingping, Zhao Dan, Lyu Qinghui, Xie Gang, Hou Yanqing
Acta Energiae Solaris Sinica . 2025, (8): 327 -332 .  DOI: 10.19912/j.0254-0096.tynxb.2024-0524

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