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RESEARCH ON PECVD COATING EQUIPMENT WITH INVERSE-TIME LIMIT PROTECTION
Huang Yujie, Yu Wenying, Liu Yongsheng, Lu Wu, Zhou Tao
Acta Energiae Solaris Sinica . 2026, (4): 672 -678 .  DOI: 10.19912/j.0254-0096.tynxb.2024-2194